Thermo-elastic Damping in a Capacitive Micro-beam Resonator Considering Hyperbolic Heat Conduction Model and Modified Couple Stress Theory

In this paper, the quality factor of thermo-elastic damping in an electro-statically deflected micro-beam resonator has been investigated. The thermo-elastic coupled equations for the deflected micro-beam have been derived using variational and Hamilton principles based on modified couple stress theory and hyperbolic heat conduction model. The thermo-elastic damping has been obtained discretizing the governing equations over spatial domain and applying complex frequency approach. The effects of the applied bias DC voltage, playing simultaneously role of an external force and softening parameter, on the quality factor have been studied. The obtained results of the modified couple stress and classic theories are compared and the effects of the material internal length-scale parameter on the differences between results of two theories have been discussed. In addition, the effects of different parameters such as beam length and ambient temperature on the quality factor have been studied.